Sidewall-Less Depth Profiling with Auger Electron Spectroscopy
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概要
- 論文の詳細を見る
In Auger depth profiling in combination with ion sputtering, use of an insular sample has improved the depth resolution and has enabled pinpoint analysis without extending measurement time. An island capped with an erosion-resistant film remains on the substrate after chemical etching. When the island is prepared to be smaller than the area subjected to ion irradiation, no crater or its sidewall appears during depth profiling. It is demonstrated that in the determination of depth resolution, surface roughening owing to sputter deposition from the sidewall of a crater plays a key role, in addition to the interference by signals from a sidewall.
- 社団法人応用物理学会の論文
- 1995-12-15
著者
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Nakano K
Tohoku Univ. Sendai Jpn
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Nakano Kenji
Institure For Materials Research Tohoku University
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SUZUKI Noritomo
TOYOTA Central Research and Development Laboratories
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Nakano K
Department Of Applied Science For Electronics And Materials Graduate School Of Engineering Sciences
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Inoue Kazuyuki
Toyota Central Research & Development Laboratories Inc
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TOKORO Maki
Toyota Central R&D Labs., Inc.
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MATSUBARA Ryohji
Toyota Motor Corporation
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NAKANO Kenji
Toyota Motor Corporation
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Suzuki Noritomo
Toyota Central R&d Labs. Inc.
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Tokoro Maki
Toyota Central R&d Labs. Inc.
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Inoue Kazuyuki
Toyota Central R&d Labs. Inc.
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