Vapor Deposition of Diamond Particles from Methane

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1982-04-20

著者

• Sato Yoichiro

  National Institute For Research In Inorganic Materials

• MATSUMOTO Seiichiro

  National Institute for Research in Inorganic Materials

• KAMO Mutsukazu

  National Institute for Research in Inorganic Materials

• SETAKA Nobuo

  National Institute for Research in Inorganic Materials

関連論文

• Vapor Deposition of Diamond Particles from Methane
• High-Rate Deposition of High-Quality, Thick Cubic Boron Nitride Films by Bias- Assisted DC Jet Plasma Chemical Vapor Deposition
• Pressure Correction at High Temperature Using the Melting Curve of Pb
• Formation of 2H-Type SiC Films by Reactive Sputtering
• Substrate Bias Effect on Diamond Deposition by DC Plasma Jet

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