Structure and Superconductivity of Sputtered Bi-Sr-Ca-Cu-O Films from Various Targets
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概要
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Bi-Sr-Ca-Cu-O films were prepared by use of the single-target sputtering method: deposited on [100] MgO substrates and then annealed at 860℃. Targets of three types were used: 1) mixed powder of, 2) calcined powder of, 3) a sintered disk of Bi_2O_3, SrCO_3, CaCO_3 and CuO. Films made from the type 1) target almost peeled off from the substrate during the annealing, and small residual films consisted of c-axis-oriented phases of Bi_2Sr_2Ca_1Cu_2O_x (2212), Bi_2Sr_2Ca_0Cu_1O_x(2201) and a slight amount of Bi_2Sr_2Ca_2Cu_3O_x(2223). The films from the type 2) and 3) targets did not peel off and consisted of randomly oriented 2212 and 2201 phases.
- 社団法人応用物理学会の論文
- 1989-10-20
著者
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IGARASHI Isemi
Toyota Central Research & Development Laboratories,Inc.
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Igarashi I
Toyota Physical And Chemical Res. Inst. Aichi‐gun Jpn
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Takeuchi Masaharu
Toyota Central Research & Development Laboratories Inc.
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SUGIYAMA Jun
Toyota Central Research and Development Labs
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Kawamoto Jun-ichi
Toyota Central Res. & Develop. Labs. Inc.
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Kawamoto Jun-ichi
Toyota Central Research & Development Laboratories Inc.
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Sugiyama Jun
Toyota Central Research & Development Laboratories Inc.
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