Defect Structures in InP Crystals by Laser Scanning Tomography

概要

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Laser-beam scanning tomography images are taken from various InP crystals. They all display a distribution of bright points which are shown to be statistically arranged along the crystallographic axes <100> and <110>. These microdefects are likely distributed along dislocations in such a way that small volumes or "cells" (typically 200-500 μm wide) are kept free from defects. It is shown that the density of defects varies with the doping of the material; lower densities were observed in Fe-doped InP crystals.
社団法人応用物理学会の論文
1987-08-20