Role of SiH_4 Gas Heating in the Growth of Hydrogenated Microcrystalline Silicon

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-06-01

著者

• Arai Takeshi

  Faculty Of Pharmaceutical Sciences Josai University

• Arai T

  Toyo Univ. Saitama Jpn

• SHIRAI Hajime

  Faculty of Engineering, Saitama University

• Shirai Hajime

  Faculty Of Engineering Saitama University

• Arai Takeshi

  Faculty Of Engineering Saitama University

関連論文

• Role of SiH_4 Gas Heating in the Growth of Hydrogenated Microcrystalline Silicon
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• The Generation of High-Density Microwave Plasma and Its Application to Large-Area Microcrystalline Silicon Thin Film Formation
• The Relationship between Age and Change in Physical Functions after Exercise Intervention. Trainability of Japanese Community-Dwelling Older Elderly

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