A High Sensitivity, Phase Sensitive d_<33> Meter for Complex Piezoelectric Constant Measurement
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概要
- 論文の詳細を見る
Based on the direct piezoelectric effect and signal comparison method, a quasi-static, high sensitivity, phase sensitive d_<33> meter has been developed. The system is capable of measuring the complex piezoelectric d_<33> constant down to about 1 pC/N and has a phase resolution of ±0.05゜. The advantage of this apparatus is that its operation is almost as easy as that of the commercial Berlincourt d_<33> meter, hence, it is suitable for everyday routine usage.
- 社団法人応用物理学会の論文
- 1993-09-01
著者
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Wang H
Microelectronics Centre School Of Electrical And Electronics Engineering Nanyang Technological Unive
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Zhang Qiming
Materials Research Laboratory And Department Of Electrical Engineering The Pennsylvania State Univer
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Zhang Qiming
Materials Research Laboratory The Pennsylvania State University
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Zhang Qiming
Materials Research Institute And Electrical Engineering Department The Pennsylvania State University
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WANG Hong
Material Engineering School of Zhengzhou University
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Cross Leslie
Materials Research Laboratory The Pennsylvania State University
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Wang Hong
Microelectronics Centre School Of Electrical And Electronics Engineering Nanyang Technological Unive
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Cross Leslie
Materials Research Laboratory Pennsylvania State University
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Cross Leslie
Materials Research Institute, The Pennsylvania State University, University Park, PA 16802, U.S.A.
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