High Performance Double Delta Doping GaAs/In_<0.25>Ga_<0.75>As/GaAs Pseudomorphic Heterostructure
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概要
- 論文の詳細を見る
We report the preparation of high two-dimensional electron gas (2DEG) concentration and mobility in double delta doping, single quantum well GaAs/In_<0.25>Ga_<0.75>As/GaAs pseudomorphic heterostructure by low-pressure metalorganic chemical vapor deposition (LP-MOCVD). Superior in gate voltage swing (3 V), saturation current density, and extrinsic transconductance to those of conventional In_xGa_<1-x5>As/GaAs pseudomorphic heterostructures with similar gate length (2μm) ever reported, were achieved.
- 社団法人応用物理学会の論文
- 1993-03-01
著者
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HSU W.C.
Department of Electrical Engineering, National Cheng Kung University
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WU T.S.
Department of Electrical Engineering, National Cheng Kung University
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WU C.L.
Department of Electrical Engineering, National Cheng Kung University
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SHIEH H.M.
Department of Electrical Engineering, National Cheng Kung University
関連論文
- The δ-Doped In_Ga_As/GaAs Pseudomorphic High Electron Mobility Transistor Structures Prepared by Low-Pressure Metal Organic Chemical Vapor Deposition
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- High Performance Double Delta Doping GaAs/In_Ga_As/GaAs Pseudomorphic Heterostructure