Fluctuation-Free Electron Emission from Non-Formed Metal-Insulator-Metal (MIM) Cathodes Fabricated by Low Current Anodic Oxidation
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概要
- 論文の詳細を見る
Fluctuation-free electron emission is obtained from MIM (Al-Al_O_3-Au) cathodes. The Al_2O_3 layer is fabricated by anodic oxidation with a reduced electrolysis current density, i.e., a reduced oxidation rate. The slow oxidation process improves the insulating effect of the Al_2O_3 layer, and enables the MIM cathodes to operate in the non-formed state. The fluctuation-free emission is reproducible when the diode voltage is cut of instantaneously. With a thin Al_2O_3 layer, the diode voltage reguired for the cathode operation is reduced to values slightly above the work function of the top electrode.
- 社団法人応用物理学会の論文
- 1993-11-15
著者
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AIDA Toshiyuki
Central Research Laboratory, Hitachi, Ltd.
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YAGUCHI Tomio
Central Research Laboratory, Hitachi, Ltd.
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SASAKI Susumu
Central Research Laboratory, Hitachi, Ltd.
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Aida Toshiyuki
Central Research Laboratory Hitachi Ltd.
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Suzuki Mutsumi
Central Research Laboratory Hitachi Ltd.
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KUSUNOKI Toshiaki
Central Research Laboratory, Hitachi, Ltd.
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Yaguchi T
Central Research Laboratory Hitachi Ltd.
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Yaguchi Tomio
Central Research Laboratory Hitachi Ltd.
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Kusunoki T
Fujitsu Lab. Ltd. Atsugi Jpn
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Sasaki Susumu
Central Research Laboratory Hitachi Ltd.
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SUZUKI Mutsumi
Central Research Laboratory, Hitachi, Ltd.
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