Fabrication of First-Order Gratings for GaAs/AlGaAs LD's by EB Lithography
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-07-20
著者
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MAEDA Minoru
Graduate School of Pharmaceutical Sciences, Kyushu University
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Maeda Minoru
Optical Measurement Technology Development Co. Ltd.
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Maeda Minoru
Graduate School Of Pharmaceutical Sciences Kyushu University
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HIRATA Takaaki
Optoelectronics Laboratory, Yokogawa Electric Co.
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SUEHIRO Masayuki
Optoelectronics Laboratory, Yokogawa Electric Co.
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Hirata T
Sophia Univ. Tokyo Jpn
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HIRATA Takaaki
Optical Measurement Technology Development Co., Lid.,Central Research Laboratory
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SUEHIRO Masayuki
Optical Measurement Technology Development Co., Lid.,Central Research Laboratory
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HOSOMATSU Haruo
Optical Measurement Technology Development Co., Lid.,Central Research Laboratory
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HOSOMATSU Haruo
Devices Laboratory, Yokogawa Electric Co., Ltd.
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Maeda M
Tokyo Tanabe Co. Ltd. Tokyo Jpn
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Hosomatsu Haruo
Devices Laboratory Yokogawa Electric Co. Ltd.
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Suehiro Masayuki
Optoelectronics Laboratory Yokogawa Electric Co.
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