Crystal Orientation of YBa_2Cu_3O_<7-y> Thin Films Prepared by RF Sputtering
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概要
- 論文の詳細を見る
The effect of growth temperature on the crystallinity and morphology of YBa_2Cu_3O_<7-y> thin films was investigated. Thin films were grown on MgO (100) single-crystal substrates by RF magnetron sputtering. Preferred orientations of thin films can be controlled by adjusting the substrate temperature, T_s; (100) a-axis oriented films were deposuted at 540℃<T_s<550℃, (110) oriented films were deposited at 565℃<T_s<600℃ and (001) c-axis oriented films were deposited above 610℃.
- 社団法人応用物理学会の論文
- 1990-12-20
著者
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Tanaka Saburo
Itami Research Laboratories Sumitomo Electric Industries Ltd.
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Itozaki Hideo
Superconducting Sensor Laboratory Itami Laboratory
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HIGAKI Kenjiro
Itami Research Laboratories. Sumitomo Electric Industries, Ltd.
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Itozaki Hideo
Itami Research Laboratories, Sumitomo Electric Industries, Ltd.
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Itozaki H
Sumitomo Electric Ind. Ltd. Itami‐shi Jpn
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Itozaki Hideo
Itami Research Laboratories Sumitomo Electric Ind. Ltd.
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Itozaki Hideo
Superconducting Sensor Laboratory
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Higaki Kenjiro
Itami Research Laboratories Sumitomo Electric Industries Ltd.
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Tanaka Saburo
Itami Research Laboratories Sumitomo Electric Ind. Ltd.
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HARADA Keizo
Itami Research Laboratories, Sumitomo Electric Ind., Ltd.
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YAZU Shuji
Itami Research Laboratories, Sumitomo Electric Ind., Ltd.
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ARIKAWA Tadashi
Itami Research Laboratories, Sumitomo Electric Industries, Lid.
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Yazu S
Itami Research Laboratories Sumitomo Electric Ind. Ltd.
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Yazu Shuji
Itami Research Laboratories Sumitomo Electric Ind. Ltd.
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Harada Keizo
Itami Research Laboratories Sumitomo Electric Ind. Ltd.
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Arikawa Tadashi
Itami Research Laboratories Sumitomo Electric Industries Lid.:(present Address) Tokyo Tungsten Co. L
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