SrS:Ce Thin Films on Different Insulating under Layers
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概要
- 論文の詳細を見る
SrS:Ce thin films were prepared on several kinds of insulating underlayers, Ta_2O_5, SiO_2, Si_3N_4 and their composite films, by hot wall deposition. The crystallinity of the SrS:Ce films was found to depend strongly upon the underlayers, although no crystal structures were confirmed for the underlayers. The SrS:Ce films grown directly on Ta_2O_5 layers gave the best crystallinity, and better luminance levels were also obtained for their electroluminescent devices, due to both the large dielectric constant of Ta_2O_5 and good crystallinity of the SrS:Ce films.
- 社団法人応用物理学会の論文
- 1995-06-15
著者
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Yang Huan
Process Development Laboratory Electronic Devices Division
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Hibino S
Shinshu Univ. Nagano Jpn
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Hibino Satoshi
Process Development Section Semiconductor Division Yamaha Corporation
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Hotta T
Process Development Laboratory Electronic Devices Division
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TANOUE Fumiyasu
Process Development Laboratory, Electronic Devices Division
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SAKAKIBARA Shingo
Process Development Laboratory, Electronic Devices Division
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YOKOI Katuyuki
Process Development Laboratory, Electronic Devices Division
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HOTTA Tadahiko
Process Development Laboratory, Electronic Devices Division
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Sakakibara Shingo
Process Development Laboratory Electronic Devices Division
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Yokoi K
Keio Univ. Yokohama Jpn
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Tanoue Fumiyasu
Process Development Laboratory Electronic Devices Division
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HIBINO Satoshi
Process Development Laboratory, Electronic Devices Division
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