Study of a Veil Structure and a Two-Step Corrosion Suppression Process in Al-Si-Cu Etching

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-04-15

著者

• Yagi Shoji

  Ntt Lsi Laboratories

• IMAI Kazuo

  NTT LSI Laboratories

• SAKUMA Kazuhito

  NTT LSI Laboratories

関連論文

• Properties of High Heat-Resistance μc-SiC_x:H Emitter Silicon HBT's
• Silicon HBT with a Low-Resistivity Amorphous SiC_x Emitter
• Study of a Veil Structure and a Two-Step Corrosion Suppression Process in Al-Si-Cu Etching
• Thin-SOI Process Using Bonding and Etch-Back Method without Epitaxial Growth
• Thin-SOI Process Using Bonding and Etch-back Method without Epitaxial Growth

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