Preparation of a BaF_2/CaF_2 Slab Optical Waveguide by Chemical Vapor Deposition
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概要
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Single crystal BaF_2 films 0.6-3.8 μm thick were grown on CaF_2 substrates by chemical vapor deposition. Fluorinated Barium β-diketone chelates; Ba(ofhd)_2 or Ba(dfhd)_2 were used as the source material and oxygen was introduced to complete the fluorination of the barium precursor. The BaF_2/CaF_2 structure functioned as a slab optical waveguide and the losses were mainly dependent on the film thickness and the surface morphologies. The minimum loss was about 1 dB/cm at 633 nm.
- 社団法人応用物理学会の論文
- 1994-03-01
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