Piezoelectric Properties and Acoustic Wave Detection of Pb(Zr_<0.52>Ti_<0.48>)O_3 Thin Films for Microelectromechanical Systems Sensor
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-07-01
著者
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Cho Chae-ryong
Department Of Chemical Engineering And Materials Science And Microtechnology Laboratory University O
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Jang Min-su
Department Of Physics Pusan National University
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Jang Min-su
Department Of Physics And Research Center For Dielectric And Advanced Matter Physics Pusan National
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FRANCIS Lorraine
Department of Chemical Engineering and Materials Science and Microtechnology Laboratory, University
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Francis Lorraine
Department Of Chemical Engineering And Materials Science And Microtechnology Laboratory University O
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