Effect of Deposition Rate and Substrate Temperature on Properties of CdTe Film

概要

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The effects of the deposition rate and the substrate temperature on the structure and the electrical and optical properties of CdTe film evaporated on an Au-coated glass substrate were investigated, and the film quality is discussed here. It is shown that the crystalline size decreased with the deposition rate and increased with the substrate temperature, and that the stoichiometry of the film was best at the deposition rate of 17 A^° sec^<-1> at room temperature. At a lower deposition rate, the film became Cd-rich and n-type, while it became Te-rich and p-type at a higher deposition rate. The Cd content increased with the substrate temperature. The films deposited at lower rates were polycrystalline and those deposited at higher rates were amorphous. The film deposited at a rate of 17 Å sec^<-1> -19 Å sec^<-1> and a substrate temperature of 100℃ showed the highest quality of all the films.
社団法人応用物理学会の論文
1983-05-20