Electron Microscopic Study of Transition Structures Formed from Titanium Oxide Evaporated Films

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概要

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• The transition structures made from films formed by evaporating TiO_<1.28> and TiO_<1.0> onto NaCl substrates have been studied by electron microscope. The structure of the films formed from TiO_<1.28> at various substrate temperatures is changed to transition structure I with ordered titanium-vacancy-rich planes by in situ heating in the electron microscope. On the other hand, transition structure II with ordered oxygen-vacancy-rich planes is formed in films made from TiO_<1.0> in the titanium-rich composition range. The former structure is found to be distorted more from the parent Nail-type lattice than the latter, and their axial ratios c_<f'>/a_<f'> are 0.93 and 0.97, respectively. The difference in the distortion is discussed from the point of view of the difference in the atomic volumes of titanium and oxygen.

• 社団法人応用物理学会の論文
• 1983-01-20

著者

• Yamada Yukio

  College Of General Education Tohoku University

関連論文

• Electron Microscopic Study of the δ-Phase in Titanium Oxide Evaporated Films
• Electron Microscopic Study of Transition Structures Formed from Titanium Oxide Evaporated Films
• Growth and Structure of Titanium Oxide Thin Films II.
• High-Resolution Electron Microscopy of Amorphous-Like Titanium Oxide Films
• Structure of Titanium Oxide Thin Films

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