Growth and Structure of Titanium Oxide Thin Films II.

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概要

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• Films formed by evaporating TiO_1.0 and TiO_1.25 onto NaCl cleavage surfaces held at about 470℃ in a vacuum of about 10^8 Torr have been studied by electron microscopy.The com-positions of the films measured by Auger electron spectroscopy were TiO_0.5 and TiO_0.74 when TiO_1.0 and TiO_1.25 were evaporated.The film made from TiO_1.25 consists mainly of fcc epitaxial crystallites of (001)- and (110)-orientation having square and rectangular shapes respectively.In the film made from TiO_1.0, fcc epitaxial crystallites of the same orientations as above appear in the early growth stage and then hcp crystallites which have Ti_2O structure begin to grow on the {111}planes of the fcc crystallites, with the increase of the film thickness.In both films made from TiO_1.0 and TiO_1.25, however, little evidence for the presence of twinned fcc crystallites grown on the{111}planes of the crystallitesof (001)-orientation has been found.

• 社団法人応用物理学会の論文
• 1978-04-05

著者

• Yamada Yukio

  College Of General Education Tohoku University

• Yamada Yukio

  College Of Arts And Sciences Tohoku University

関連論文

• Electron Microscopic Study of the δ-Phase in Titanium Oxide Evaporated Films
• Electron Microscopic Study of Transition Structures Formed from Titanium Oxide Evaporated Films
• Growth and Structure of Titanium Oxide Thin Films II.
• High-Resolution Electron Microscopy of Amorphous-Like Titanium Oxide Films
• Structure of Titanium Oxide Thin Films
• Growth and Structure of Titanium Oxide Thin Films. I.
• Distribution of Etch Pits on KCl Whiskers

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