Fabrication of Submicron Pattern with an EB Lithographic System Using a Field Emission (FE) Electron Gun

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概要

著者

Hosaka Sumio
Cooperative Laboratories Vlsi Technology Research Association:(present Address) Central Research Lab
Hayakawa Hajime
Cooperative Laboratories Vlsi Technology Research Association:(present Address) Device Development C
Migitaka Masatoshi
Cooperative Laboratories Vlsi Technology Research Association:(present Address) Central Research Lab
Migitaka Masatoshi
Cooperative Laboratories Vlsi Technology Research Association
ICHIHASHI Mikio
Cooperative Laboratories, VLSI Technology Research Association
NISHI Sadaaki
Cooperative Laboratories, VLSI Technology Research Association
Nishi Sadaaki
Cooperative Laboratories Vlsi Technology Research Association:(present Address) Present Address: Sys
Ichihashi Mikio
Cooperative Laboratories Vlsi Technology Research Association:(present Address) Central Research Lab

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