Proximity Effect in an EB Lithographic System Using a Field Emission (FE) Electron Gun

スポンサーリンク

概要

著者

Hosaka Sumio
Cooperative Laboratories Vlsi Technology Research Association:(present Address) Central Research Lab
Hayakawa Hajime
Cooperative Laboratories Vlsi Technology Research Association:(present Address) Device Development C
Migitaka Masatoshi
Cooperative Laboratories Vlsi Technology Research Association:(present Address) Central Research Lab
Migitaka Masatoshi
Cooperative Laboratories Vlsi Technology Research Association
ICHIHASHI Mikio
Cooperative Laboratories, VLSI Technology Research Association
NISHI Sadaaki
Cooperative Laboratories, VLSI Technology Research Association
Nishi Sadaaki
Cooperative Laboratories Vlsi Technology Research Association:(present Address) Present Address: Sys
Ichihashi Mikio
Cooperative Laboratories Vlsi Technology Research Association:(present Address) Central Research Lab

関連論文

スポンサーリンク