Electrical Properties of Ti-Fe Films

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概要

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• Ti_xFe_<1-x> (0<x<1) films were prepared by composite-cathode sputtering and their electrical resistivity (p) was measured. The plot of p against x was bell- shaped, with two noticeable dips at 0.33 and 0.47 corresponding to the intermetallic compounds of TiFe_2 and TiFe, respectively. Films of the amorphous phase with x=0.7 had a maximum p of about 700μΩ-cm and a TCR of -200 ppm/K. p appears to reflect the structural features of the films.

• 1982-02-05

著者

• Kurita Noriaki

  Graduate School Of Electronic Science And Technology Shizuoka University

• Igasaki Yasuhiro

  Research Institute Of Electronics Shizuoka University

• Mitsuhashi Hiroji

  Research Institute Of Electronics Shizuoka University

関連論文

• Effects of the Preparation Conditions on Indium Content in As-grown In-Se Films by Electrodeposition
• X-Ray Diffraction Data on Evaporated Organic Films of Fatty Acids
• Structure of Ti-Fe Alloy Films Prepared by Composite-Cathode Sputtering
• Structure and Electrical Properties of Titanium Nitride Films
• Electrical Properties of Ti-Fe Films

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