Structure of Ti-Fe Alloy Films Prepared by Composite-Cathode Sputtering

概要

論文の詳細を見る
Films of the binary alloy Ti_xFe_<1-x>(0_<x<1) of uniform composition, from 500Å to 1μm thick, were prepared by d. c. sputtering with a composite cathode containing a Ti plate and Fe wires, or an Fe plate and Ti wires. Analyses of the films by EPMA and Auger electron spectroscopy showed that the composition was uniform over an area of about 20×20mm^2. X-ray and electron diffraction analyses of the the films showed the existence of amorphous phases at 0.05 <x<0.30, 0.35<x<0.50 and 0.55<x<0.83 and a β-Ti (b.c.c.) phase at 0.80<x<0.94, in addition to an α-Fe (b.c.c.) phase at 0<x<0.30, a TiFe_2 (hexagonal) Laves phase at 0.25<x<0.35, a TiFe (CsCl type) phase at 0.45<x<0.55 and an α-Ti (h.c.p.) phase at 0.83<x<1.
社団法人応用物理学会の論文
1982-01-05