Effects of Silicon-Nitride Films on the Electronic Properties of Si-SiO_2 Interfaces

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1982-12-20

著者

• Kamada Mikio

  Semiconductor Division Sony Corpolation:(present Address) Sony Research Center

• YAGI Atsuo

  Semiconductor Division, SONY Corpolation

• Yagi Atsuo

  Semiconductor Division Sony Corpolation

• Yagi Atsuo

  Semiconductor Development Division Central Research Laboratory Sony Corporation

関連論文

• Effects of Silicon-Nitride Films on the Electronic Properties of Si-SiO_2 Interfaces
• Anomalous Conductivity at Low Temperatures in an Si-MOSFET with Sub-Micron Gate
• Magnetic and Electrical Properties of N-Channel MOS Hall-Effect Device

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