Vacancy Distribution in Aluminum Interconnections on Semiconductor Devices
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-04-15
著者
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Asada Kunihiro
School Of Engineering University Of Tokyo:vlsi Design And Education Center University Of Tokyo
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Aoyagi Minoru
Nissan Motor Co. Ltd.:school Of Engineering University Of Tokyo
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Aoyagi Minoru
Nissan Motor Co. Ltd.
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Asada Kunihiro
School Of Engineering The University Of Tokyo (vlsi Design And Education Center University Of Tokyo)
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- Vacancy Distribution in Aluminum Interconnections on Semiconductor Devices
- Quenching of Vacancies in Aluminum Interconnections on Semiconductor Devices