High-Density Plasma Produced by a Holey-Plate Surface-Wave Structure Cavity
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-10-15
著者
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Sakurai T
Department Of Chemical Engineering Science Yokohama National University
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Sakurai Takeki
Faculty Of Engineering Yamanashi University
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YOSHIDA Yoshikazu
Faculty of Engineering, Yamanashi University
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Yoshida Yoshikazu
Faculty Of Engineering Yamanashi University
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- High-Density Plasma Produced by a Holey-Plate Surface-Wave Structure Cavity