Systematic Low Temperature Silicon Bonding using Pressure and Temperature
スポンサーリンク
概要
- 論文の詳細を見る
We have developed a systematic three-step process to low temperature direct bond silicon and/or SiO_2 surfaces. The process activates the surface with ammonia, argon and oxygen plasma. While these activation processes allow a very strong low temperature bond to be created, they require techniques distinctly different from those found in previous work for reproducible results. The plasma processes do not result in a bond that propagates as a wave resulting from a point source initiation. A substantial pressure is required to initiate the bond. We have found that a three-step process using pressure and temperature results in very strong, reproducible bonds.
- 社団法人応用物理学会の論文
- 1998-03-15
著者
-
Bower R
Univ. California California Usa
-
LI Y.
Department of Biomedical Engineering, Duke University
-
Li Y
Univ. California California Usa
-
Li Y.albert
Department Of Electrical And Computer Engineering University Of California
-
Bower Robert
Department Of Electrical And Computer Engineering University Of California
関連論文
- Bioactive Bone Cement as a Principal Fixture for Spinal Burst Fracture : An In Vitro Biomechanical and Morphologic Study
- The Evolution of Microstructure in Vanadium Microalloyed Steels
- Synchronous Phase Clustering in a Network of Neurons with Spatially Decaying Exitatory Coupling
- The Amelogenin C-Terminus Is Required for Enamel Development
- Low Temperature Copper to Copper Direct Bonding
- Mapping of a novel locus for keratosis follicularis squamosa on chromosome 7p14.3-7p12.1
- Dynamic Responses of a Suspended Bridge with a Rectangular Cross-section
- Systematic Low Temperature Silicon Bonding using Pressure and Temperature
- Surface Roughness of Hydrogen Ion Cut Low Temperature Bonded Thin Film Layers
- Dynamic Analysis and Control Synthesis of a Link-Based Dolphin-Like Robot Capable of Three-Dimensional Movements
- Cross Wind Excitation of a 2D Square Prism with Vibrating Leading Edge Flaps
- Cytogenetic Studies in North American Minnows (Cyprinidae) XXVI. Chromosomal NOR phenotypes of 21 species from the Western United States
- Interferon-γ Down-regulates Gene Expression of Cathepsin K in Osteoclasts and Inhibits Osteoclast Formation
- Isoproterenol Improves Secretion of Transplanted Submandibular Glands
- Effects of Phenylephrine on Transplanted Submandibular Gland
- Structure and Magnetic Properties of Chill-cast and Melt-spun Nd_x(Fe_3Al)_ and Nd_(Fe_yAl)_ Alloys
- Microstructural Effect of Magnetic Properties of FeCo-based Soft Magnetic Alloys
- Thermopower and Resistivity of 1212-Type Phase TlSr_2 (Er_Sr_y) Cu_2O_
- Activation of GABAergic Neurons following Tooth Pulp Stimulation
- A 3-D WAVE-CURRENT DRIVEN COASTAL SEDIMENT TRANSPORT MODEL
- Survey of Oral Microbial Diversity using PCR-based Denaturing Gradient Gel Electrophoresis
- Mode of Delivery and Other Maternal Factors Influence the Acquisition of Streptococcus mutans in Infants
- Bulk Hard Magnetic Alloys in Nd-Fe-B System Prepared by Casting and Melt Spinning
- Expression of Osteoclastogenesis Inducers in a Tissue Model of Periodontal Ligament under Compression
- The Fidelity of Initial Acquisition of Mutans Streptococci by Infants from Their Mothers
- 1207 台湾の在来型住宅における台所の室内空気環境改善のための予測(S12-O口頭発表, Session 12室内空気質)