Surface Morphology Control of YBa_2Cu_3O_x Thin Films Grown by Metalorganic Chemical Vapor Deposition Using Vicinal SrTiO_3 Substrates
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概要
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We have used vicinal SrTiO_3 substrates for improving and controlling the surface roughness of a YBa_2Cu_3O_x film. If we use a SrTiO_3(100) substrate, the surface morphology of the film is abruptly degraded over a thickness equivalent to 15 unit cells. In contrast to using a SrTiO_3(100) substrate, good surface morphology is maintained, even at 20-unit-cell thickness, when using a vicinal SrTiO_3(100) substrate misoriented by 2°. The reason is that the effective terrace width produced by 2° misorientation is almost equal to the migration length of species on the growing surface. This is suitable for controlling the surface morphology of a YBa_2Cu_3O_x film.
- 社団法人応用物理学会の論文
- 1996-06-15
著者
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ZAMA Hideaki
Superconductivity Research Laboratory, International Superconductivity Technology Center
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Zama Hideaki
Superconductivity Research Laboratory International Superconductivity Technology Center
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