Morphology and Structure of Aluminum Nitride Thin Films on Glass Substrates
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-03-15
著者
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CHEN Ying-Chung
Institute of Electrical Engineering, National Sun Yat-Sen University
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CHENG Chien-Chuan
Institute of Electrical Engineering, National Sun Yat-Sen University
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Chen W‐r
National Taiwan Univ. Taiwan Chn
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Chen Ying-chung
Institute Of Electrical Engineering National Sun Yat-sen University
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WANG Horng-Jwo
Institute of Electrical Engineering, National Sun Yat-Sen University
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CHEN Wen-Rong
Institute of Electrical Engineering, National Sun Yat-Sen University
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Wang Horng-jwo
Institute Of Electrical Engineering National Sun Yat-sen University
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Chen Wen-rong
Institute Of Electrical Engineering National Sun Yat-sen University
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Cheng Chien-chuan
Institute Of Electrical Engineering National Sun Yat-sen University
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- Morphology and Structure of Aluminum Nitride Thin Films on Glass Substrates
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