Density Measurement of O Atoms in Helicon Wave Oxygen Discharge by Two-Photon Laser-Induced Fluorescence (<Special Issue> Plasma Processing)
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概要
- 論文の詳細を見る
Ground-state O atoms in oxygen plasma have been detected by means of two-photon laser-induced fluorescence at 226 nm. A calibration method for obtaining the absolute O atom density was established, using O atoms produced by photodissociation of molecular oxygen with 226 nm photons. The O atom density in helicon wave oxygen discharge was determined, and a typical value was 1.3×10^<19>m^<-3> at a gas pressure of 50 mTorr and electron density of 5.2×10^<16>m^<-3>. Spatial and temporal variations of the O atom density have been successfully measured.
- 社団法人応用物理学会の論文
- 1994-07-30
著者
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SHOJI Tatsuo
Plasma Science Center, Nagoya University
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Konno Yuji
Plasma Science Center Nagoya University:(present Address) Yamaguchi Earth Station Kokusai Denshin De
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Shoji Tatsuo
Plasma Science Center Nagoya University
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Sato Teruyuki
Plasma Science Center Nagoya University:(present Address) Faculty Of Engineering Iwate University
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Kadota Kiyoshi
Plasma Science Center Nagoya University
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AOTO Koji
Plasma Science Center, Nagoya University
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Aoto Koji
Center For Microelectronic Systems Kyushu Institute Of Technology
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