Influence of Humidity on AC Electrical Breakdown in Plasma-Polymerized Thin Films
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概要
- 論文の詳細を見る
The ac electrical breakdown has been measured in plasma-polymerized thin films. The breakdown strength is on the order of 8-10 MV/cm under a dry condition; however, it decreases drastically with humidity. Leakage current increases with humidity, while dielectric loss does not show significant increase with it. Results have been explained in terms of thermal breakdown based on Joule heating due to an enhanced leakage current through a localized narrow channel.
- 社団法人応用物理学会の論文
- 1994-03-15
著者
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Miyairi Keiichi
Department Of Electrical And Electronic Engineering Shinshu University
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Miyairi Keiichi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Shinshu University
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