Internal Stress Distribution Estimation in Liquid-Encapsulated Czochralski Grown GaAs Single Crystals Using Measured Temperature on Dummy Crystals
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-02-15
著者
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Nishio Joji
Advanced Semiconductor Devices Research Laboratories R&d Center Toshiba Corporation
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Nishio J
Toshiba Corp. Kawasaki Jpn
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NISHIO Johji
Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation
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YASUNAGA Toshio
Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation
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NAKATA Yuhji
Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation
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Nakata Y
Toshiba Corp. Kawasaki Jpn
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Yasunaga Toshio
Materials And Devices Research Laboratories Research And Development Center Toshiba Corporation
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- Internal Stress Distribution Estimation in Liquid-Encapsulated Czochralski Grown GaAs Single Crystals Using Measured Temperature on Dummy Crystals
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