X-Ray Observations of Anomalous Etch Patterns in Silicon Crystals

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1967-03-15

著者

• Hirano Akio

  Kitaitami Works Mitsubishi Electric Corporation

• Yukimoto Yoshinori

  Kitaitami Works Mitsubishi Electric Corporation

• SUGIOKA Yasoichi

  Kitaitami Works, Mitsubishi Electric Corporation

• Sugioka Yasoichi

  Kitaitami Works Mitsubishi Electric Corporation

関連論文

• Study of Tin Diffusion into Silicon by Backscattering Analysis
• Properties of Thermally Grown Silicon Nitride Films
• Multiple Dislocation Loops Observed in Silicon Crystals Grown in Hydrogen Ambient
• X-Ray Observations of Anomalous Etch Patterns in Silicon Crystals
• The Nature of the Source of Dislocation Loops Generated by Gold Diffusion into Silicon Crystals

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