Properties of Thermally Grown Silicon Nitride Films
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概要
- 論文の詳細を見る
- 社団法人日本物理学会の論文
- 1967-09-05
著者
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Okada Kazuo
The Central Research Laboratories Mitsubishi Electric Corporation
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SAKANE Hideo
Kitaitami Works, Mitsubishi Electric Corporation
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SUGIOKA Yasoichi
Kitaitami Works, Mitsubishi Electric Corporation
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Sakane Hideo
Kitaitami Works Mitsubishi Electric Corporation
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Sugioka Yasoichi
Kitaitami Works Mitsubishi Electric Corporation
関連論文
- Properties of Thermally Grown Silicon Nitride Films
- Multiple Dislocation Loops Observed in Silicon Crystals Grown in Hydrogen Ambient
- X-Ray Observations of Anomalous Etch Patterns in Silicon Crystals