Lattice Distortion Induced by Scratching on the Surface of Silicon Single Crystal Wafer

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概要

• 論文の詳細を見る

• Scratchings under various loads are made on the wafer surface parallel to the (111) plane with diamond point, and the lattice distortion around each scratch is investigated by means of the microscopic and the divergent X-ray methods. With load less than a critical value, no microcrack occurs and only minute strains are induced in the immediate surroundings of the scratches. With load beyond the critical value, microcracks are observed and lattice planes are misoriented with the maximum angle of several tens of minutes in the region near the scratches. This misorientation is interpreted to be due to the poor healing of microcracks. The lattice distortion due to scratchings is basically of elastic character regardless of whether microcracks occur or not.

• 社団法人応用物理学会の論文
• 1974-12-05

著者

• SUNADA Junji

  Faculty of Education, Chiba University

• Sunada Junji

  Faculty Of Education Chiba Universi

• Sunada Junji

  Faculty Of Education Chiba University

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• Lattice Distortion Induced by Scratching on the Surface of Silicon Single Crystal Wafer

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