A Current Instability in TiO_2 Thin Film

概要

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The current instability is observed in the sputtered TiO_2 thin films of Au-TiO_2-Ti sandwich system under the application of positive bias on Au electrode. The process of the present current instability is studied in relation to the hydrogen ion conduction in the TiO_2 thin films. As a result, the process is conjectured as follows: 1) dissociation of adsorbed water at Au-TiO_2 interface, 2) injection of H^+ into TiO_2 at the positive bias, 3) migration of H^+ through TiO_2 under the applied field. Dissociation of water results from a coarse texture of the film surface. From the current response at the recovery of the current instability, the diffusion activation energy of H^+ in the TiO_2 films is estimated at 0.07eV which is in good agreement with the value in TiO_2 single crystal.
社団法人応用物理学会の論文
1970-09-05