大気圧マイクロ波加熱酸素プラズマの安定放電条件と数値解析

概要

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A microwave discharge apparatus was developed which generates oxygen plasma. Characteristics of the stable discharge condition of the microwave heated plasma was investigated experimentally. And numerical calculation was carried out in order to obtain some informations about outlines of temperature, flow and oxygen cocentration distributions of the generated plasma. Experimental results show that the microwave discharge depends on gas flow rate of working gas and input power strongly. And conditions for the stable discharge were obtained. Numerical results introduce the following conclusion. The plasma field estimated by using the model, which consists of fluid equation and electro-magnetic equations, predicts that in the plasma there exists the high concentration of active atom and this plasma generator can function well as an active atomic source rather than a plasma source.
1997-09-25