平行平板電極間の高周波放電における生成プラズマ密度の理論的検討

概要

論文の詳細を見る
Several characteristic features of radio frequency (RF) discharges between a pair of dielectric-covered planar electrodes were found by solving an electrostatic four-rank Laplace equation. In this theory, effects of electron temperature on the stationary RF plasma were studied from a view point of wave-produced plasmas. It was concluded that the stationary plasmas can be produced by the lowest main (m = 0) and the next lower (m = 1) resonances of an electron plasma wave . The produced plasma density was determined, depending on electron temperature , thickness of the plasma , an operating RF frequency and so on . Two thresholds for applied RF voltage and gas pressure to maintain the plasma were also obtained.
社団法人プラズマ・核融合学会の論文
1996-11-25