PDP用Y_2O_3陰極の開発

概要

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For the purpose of the improving luminous efficiency of PDP, a cathode featuring a low discharge voltage has been developed employing a thin film of Al electrode covered with Y_2O_3. This structure enables the cathode to have long life. By applying the Y_2O_3/Al cathode, the DC-PDP can be operated using 100V less than an ordinary panel can be using an Al cathode. In comparison to MgO as a protecting layer of AC-PDP, the Y_2O_3 has excellent sedondary electron emission characteristics. In order to clarify the conduction mechanism, which is necessary for a dc discharge, the surface and depth profile of the cathode is examined with SEM, RBS, and AES. Many small cracks are found in the Y_2O_3 which are caused by the high-temperature process. From the cracks, an Al cathode bus line is sputtered during the aging process and the surface of the Y_2O_3 is covered with a thin island-like Al film and a conduciton path is formed through the cracks.
社団法人映像情報メディア学会の論文
2001-03-20