Hydrogen Passivation of TFTs with Different Film Structure : TFT TECHNOLOGIES

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概要

• 論文の詳細を見る

• Thin film transistors (TFTs) with various active polycrystalline silicon (poly-Si) layers fabricated using low temperature furnace annealing, high temperature furnace treatment, and laser recrystallization technique were investigated. Hydrogen plasma treatment for 30 min was performed to find the hydrogen passivation effects on the different poly-Si film structures. A dendritic structure was formed for the LPCVD amorphous-Si films after low-temperature furnace annealing. However, an equi-axised structure was obtained for the LPCVD silicon films deposited at 625℃. Consequently, TFTs With dendritic active layer obtained from the long-time, low-temperature annealing also possessed the better electrical characteristics in the passivation treatment. It is attributed to its larger grain sizes and the vague grain boundaries.

• 社団法人映像情報メディア学会の論文
• 1993-10-27

著者

• Tsai M.j.

  Department Of Electronics Engineering And National Nano Device Laboratory National Chiao Tung Univer

• Tai Y.H.

  Department of Electronics Engineering and National Nano Device Laboratory, National Chiao Tung Unive

• Wang F.S.

  Department of Electronics Engineering and National Nano Device Laboratory, National Chiao Tung Unive

• Feng M.S.

  Institute of Materials Science and Engineering, National Chiao Tung University

• Cheng H.C.

  Department of Electronics Engineering and National Nano Device Laboratory, National Chiao Tung Unive

• Feng M.s.

  Institute Of Materials Science And Engineering National Chiao Tung University

• Cheng H.c.

  Department Of Electronics Engineering And National Nano Device Laboratory National Chiao Tung Univer

• Cheng H.c.

  Department Of Electronics Engineering And Institute Of Electronics

• Tai Y.h.

  Department Of Electronics Engineering And National Nano Device Laboratory National Chiao Tung Univer

• Wang F.s.

  Department Of Electronics Engineering And National Nano Device Laboratory National Chiao Tung Univer

関連論文

• Hydrogen Passivation of TFTs with Different Film Structure : TFT TECHNOLOGIES
• Passivation Effects of Different Plasma on the Polycrystalline Silicon Thin Film Transistors : TFT TECHNOLIGIES
• Study of the Processing Parameters for Field Emission Displays : OTHER DISPLAY

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