Passivation Effects of Different Plasma on the Polycrystalline Silicon Thin Film Transistors : TFT TECHNOLIGIES
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概要
- 論文の詳細を見る
Electrical characteristics of polycrystalline silicon thin film transistors (TFTs) have been significantly improved using plasma hydrogenation. Different mole fractions of hydrogen diluted with nitrogen to perform the plasma passivation of TFTs were also investigated. The nitrogen-containing hydrogen plasma treatment showed better passivation effect than that for the pure hydrogen plasma. Oxygen plasma was also introduced to conduct the passivation effects and compared with the conventional hydrogen plasma. Pure oxygen plasma treatment showed a comparable or even better device improvement than pure hydrogen plasma passivation did. The results were attributed to the double-bond passivation and the grain growth enlargement after the subsequent annealing.
- 社団法人映像情報メディア学会の論文
- 1993-10-27
著者
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Tsai M.j.
Department Of Electronics Engineering And National Nano Device Laboratory National Chiao Tung Univer
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Tai Y.H.
Department of Electronics Engineering and National Nano Device Laboratory, National Chiao Tung Unive
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Cheng H.C.
Department of Electronics Engineering and National Nano Device Laboratory, National Chiao Tung Unive
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Wang S.Y.
Department of Electronics Engineering and National Nano Device Laboratory, National Chiao Tung Unive
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Wang S.y.
Department Of Electronics Engineering And National Nano Device Laboratory National Chiao Tung Univer
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Cheng H.c.
Department Of Electronics Engineering And National Nano Device Laboratory National Chiao Tung Univer
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Cheng H.c.
Department Of Electronics Engineering And Institute Of Electronics
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Tai Y.h.
Department Of Electronics Engineering And National Nano Device Laboratory National Chiao Tung Univer
関連論文
- Hydrogen Passivation of TFTs with Different Film Structure : TFT TECHNOLOGIES
- Passivation Effects of Different Plasma on the Polycrystalline Silicon Thin Film Transistors : TFT TECHNOLIGIES
- Study of the Processing Parameters for Field Emission Displays : OTHER DISPLAY