Preparation and magnetic properties of ferrite thin-film media
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概要
- 論文の詳細を見る
Employing reactive sputtering using an electron-cyclotron-resonance microwave plasma without oxidation process, high coercivity ferrite thin-films with perpendicular magnetic anisotropy were successfully prepared without NiO underlayer at low substrate temperature. The ferrite thin-film deposited on glass substrate had smooth surface and were composed of small grains. Perpendicular recording was performed on the ferrite thin-film hard disk. The ferrite thin-films with high coercivity could be prepared on flexible film substrates (Polyimide and PET).
- 社団法人電子情報通信学会の論文
- 2001-09-01
著者
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Yamamoto Shu
Kdd R&d Laboratories Inc.
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Kurisu H
Graduate School Of Science And Engineering Yamaguchi University
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Matsuura M
Yamaguchi Study Center The Open University Of Japan
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MATSUURA Mitsuru
Yamaguchi Study Center, The Open University of Japan
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YAMAMOTO Setsuo
Yamaguchi Univ.
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HIRATA Kei
Yamaguchi Univ.
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KURISU Hiroki
Yamaguchi Univ.
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DOI Takanori
TODA KOGYO Corp.
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TAMARI Kousaku
TODA KOGYO Corp.
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Tamari K
Toda Kogyo Corp.
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Matsuura M
Faculty Of Engineering Yamaguchi University
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