Co-Cr films prepared by sputtering using electron cyclotron resonance microwave plasma
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概要
- 論文の詳細を見る
- American Institute of Physicsの論文
- 1996-04-15
著者
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Kurisu H
Graduate School Of Science And Engineering Yamaguchi University
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Shitamitsu K.
Faculty Of Engineering Yamaguchi Univ.
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Matsuura M
Taiyo Yuden Co. Ltd.
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