A High-Resolution Measurement System for Surface Profile of Electric Contact
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概要
- 論文の詳細を見る
We discussed on relationship between the width of slit ray and the accuracy of the measurement system for surface profile of electric contact. To obtain resolution of 10[μm], we designed the mechanism which keeps constant the focal length between the object and the lens. As a result, the width of slit ray was clear in the whole surface. A section image could measured exactly and enhanced the resolution.
- 社団法人電子情報通信学会の論文
- 1998-03-25
著者
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NEMOTO Yoshiaki
GSIS,Tohoku Univ.
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Nemoto Y
Graduate School Of Information Sciences Tohoku University
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Ebara Yasuo
Graduate School Of Information Science Tohoku University
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Sone H
Tohoku University
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EBARA Yasuo
GSIS, Tohoku University
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SONE Hideaki
GSIS, Tohoku University
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TAKAGI Tasuku
College of Engineering, Nihon University
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Takagi Tasuku
College Of Engineering Nihon University
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