Deformation Control of Metal/Nitride Microbridges (Special Issue on Micromachine Technology)

概要

論文の詳細を見る
It is necessery to investigate the buckling mechanism in order to obtaining good performance from various sensors composed of resistors and microbridges or membranes. Especially for flow sensors, a convex formed bridge has an advantage over a flat or concave bridge with respect to heat transfer coefficient. We have fabricated various shapes of bridges and have prepared SiN_x sputtered films as the support films of microbridges and Pt sputtered or evaporated films as resistors. We have achieved deformation control for both the longitudinal axis and transverse axis of Pt/SiN_x double layered microbridges by appropriate selection of the total residual stress of Pt/SiN_x structures and of the stress gradient between the Pt film and SiN_x film. The deformation direction of the longitudinal axis of bridges for the beam bridge (Type I) are all the same as that of cantilevers and may be predicted via the stress gradient between the Pt and SiN_x filmes of the bridges. The deflection of the transverse axis of the table bridge supported by four beams (Type II) changes linearly with the total stress of the Pt/SiN_x structure and the deformation changes for the transverse axis are the same as that of completely free films as predicted from the stress gradient between the Pt film and the SiN_x film. The interesting result is that the deformation direction for the longitudinal axis of Type II is opposite to that of Type I with the same film structure. We discuss the reason for this opposition via differences in the progress of the anisotropic etching. We consider that this result will expand the range of manufacturable shapes and film structures of microbridges.
社団法人電子情報通信学会の論文
1997-02-25

Deformation Control of Metal/Nitride Microbridges (Special Issue on Micromachine Technology)

スポンサーリンク

概要

著者

関連論文

スポンサーリンク