Deformation Control of Microbridges for Thermal Flow Sensors

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概要

• 論文の詳細を見る
• 1997-02-19

著者

• Matsuura T

  Muroran Inst. Technol. Muroran‐shi Jpn

• Kawata Kaoru

  Mitsubishi Electric Corporation

• TSUTSUMI Kazuhiko

  Mitsubishi Electric Corporation

• MATSUURA Tsukasa

  Mitsubishi Electric Corporation

• TAGUCHI Motohisa

  Mitsubishi Electric Corporation

• Taguchi M

  Mitsubishi Electric Corporation

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