高周波キャリア型薄膜磁界センサの最近の動向

概要

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This paper reports a miniature magnetic field sensor module for intelligent transportation systems (ITSs) . A non-uniform bridge connection of a high-frequency carrier-type thin-film sensor was examined, using CoNbZr magnetic legs and Cu conductive legs in order to avoid cross-talk of the magnetic flux in adjacent legs of the bridge. A bridge-connected high-frequency carrier-type magnetic sensor was fabricated on an amorphous SmCo magnetic thin film, which provided a dc bias magnetic field to the sensor. Linear output was obtained at an external magnetic field of -4 to +4 Oe, because the new circuit supplies negative feedback to the sensor by means of a feedback coil that excites a dc bias magnetic field. This sensor is thought to be applicable to other commodities besides ITSs.
社団法人日本磁気学会の論文
2000-02-01