スパッタリングによる感温磁性フェライト薄膜センサ素子の作製

概要

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Temperature-sensitive magnetic bulk cores and thick films have been fabricated for thermal sensors. These magnetic substances are used in larg size instruments, but cannot be adapted for miniaturization. The authors have priviously been proposed a temprature-sensitive magnetic thin film annealed in oxygen atmosphere, but the saturation magnetization is below 1/5 of abluk core. Then a teperature-sensitive Mn-Zn ferrite thin film sensor device argon atomsphere. TMS's saturation magnetization is nearly equal to that of an Mn-Zn bulk ferrite. The magnetization has a marked temperature dependence like that of a bluk core or a thick film. A TMS with a small heat capacitor responds sharply to a minute temperature variation, and is therefore expected to be applicable in pyromagnetic photosensors, photo pattern sensors, znd enzyme sensors.
社団法人日本磁気学会の論文
1998-04-15