MRヘッドギャップ用アルミナ膜の検討

概要

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The insulating properties, internal stress, and film structure of Si-O-added Al-O films, and their etching characteristics when immersed in water, were investigated to determine their suitability as shield MR head materials for highdensity magnetic recording. The films showed good insulating properties, low internal compresive stress, and excellent corrosion resistance in water. It is concluded that the Si-O-added Al-O films with thicknesses of up to 50nm should be adopted to reduce the thickness of gapinsulating film.
1998-04-15