ナノグラニュラー(Co_<.92>Fe_<.08>)-Al-O/SiO_2多層膜の軟磁気特性

概要

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The dependence of oxygen concentration on magnetic properties of multi-layered Co_<.92>Fe_<.08>-Al-O/SiO_2 films was investigated. Films were prepared by an Ar+O_2 reactive sputtering deposition method. H_c lower than 0.5 kA/m was realized in the multi-layered films with wide O concentraion from 0 to 28 at.%. The anisotropy field (H_k) of soft magnetic multi-layers varied continuously from 1.1 kA/m to 10.5 kA/m with variation of the O concentration in the magnetic layers. The frequency response of their permeability was consistent with the calculated values, and could be controlled just by choosing the O concentration in magnetic layers. SEM observation clarified the attribution of the small H_c to the static magnetic coupling among magnetic layers and the refinement of granules in magnetic layers. The H_k may be related to the microstructure of the films, because H_k is proportional to the electrical resistivity of films.
2001-04-15