金属-フッ化物系ナノグラニュラー薄膜のトンネル型巨大磁気抵抗効果

概要

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The properties and structure of (Fe, Co)-Mg-F films, prepared by a tandem deposition method using rf sputtering apparatus, were studied. These films show granular-type TMR properties, and the MR ratio at 10 kOe of 42 vol. % Fe-Mg-F film is 7. 8%, which is about twice large as that of Fe-Al-O film. The ρ values of the (Fe, Co)-Mg-F films are 10^2-10^4 times larger than that of (Fe, Co)-Al-O films. (Fe, Co)-Mg-F films have a nano-granular structure composed of metallic granules with a diameter of 2-3 nm and thin insulator boundaries; this structure is almost the same as that of (Fe, Co)-Al-O and other metal-oxide nano-granular TMR films. However, the insulator boundaries of (Fe, Co)-Mg-F films are formed from crystalline phase, while the structure of the boundary is amorphous phase in the case of metal-oxide-type nano-granular films.
社団法人日本磁気学会の論文
2000-04-15