LSIパッケージにおける配線導体のインダクタンス計算方法の評価 (<特集>パワーマグネティックス)

概要

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This paper presents the method for calculating the external self-inductance L_e, the internal self-inductance L_i, and the mutual inductance M of a conductor in LSI packages, and the estimation of those methods. A straight conductor with a cross-section of 5×60 μm is divided into between 48 and 19,200 straight segments. The inductances L_e, L_i, and M can be calculated by the electrical formulas, since all segments are in parallel. The accuracy of the calculation is about 0.2% at L_e when the conductor is divided into 300 segments, and about 5.5% at L_i when the conductor is divided into 19,200 segments. L_i is decreased from 132 to 36 pH by the skin effect when the frequency is increased from 0.1 to 1.9 GHz. The inductance L, of a specimen with a micro-strip line is calculated and measured. The difference between the calculated and measured values is less than 17% in the frequency range from 1 to 10 MHz.
社団法人日本磁気学会の論文
1997-04-15